Electron microscope

An electron microscope is a type of microscope that uses a particle beam of electrons to illuminate a specimen and create a highly-magnified image. Electron microscopes have much greater resolving power than light microscopes that use electromagnetic radi
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The idea behind an electron microscope is to fire a stream of electrons with a very small wavelength at the object in question  This allows smaller objects to be distinguished than is
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TEAM 0 5  the world s best transmission electron microscope  has been installed at the National Centre for Electron Microscopy   c  Roy Kaltschmidt  Lawrence Berkeley National Laboratory
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Source: http://en.wikipedia.org/wiki/Electron_microscope

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Diagram of a transmission electron microscope

An electron microscope is a type of microscope that uses a particle beam of electrons to illuminate a specimen and create a highly-magnified image. Electron microscopes have much greater resolving power than light microscopes that use electromagnetic radiation and can obtain much higher magnifications of up to 1 million times, while the best light microscopes are limited to magnifications of 1000 times. Both electron and light microscopes have resolution limitations, imposed by the wavelength of the radiation they use. The greater resolution and magnification of the electron microscope is because the de Broglie wavelength of an electron is much smaller than that of a photon of visible light. The electron microscope uses electrostatic and electromagnetic lenses in forming the image by controlling the electron beam to focus it at a specific plane relative to the specimen. This manner is similar to how a light microscope uses glass lenses to focus light on or through a specimen to form an image.

Contents

  • 1 History
  • 2 Types
    • 2.1 Transmission Electron Microscope (TEM)
    • 2.2 Scanning Electron Microscope (SEM)
    • 2.3 Reflection Electron Microscope (REM)
    • 2.4 Scanning Transmission Electron Microscope (STEM)
  • 3 Sample preparation
  • 4 Disadvantages
  • 5 Applications
  • 6 See also
  • 7 References
  • 8 External links
    • 8.1 General
    • 8.2 History
    • 8.3 Other

History

Electron microscope constructed by Ernst Ruska in 1933

The first electron microscope prototype was built in 1931 by the German engineers Ernst Ruska and Max Knoll.[1] Although this initial instrument was capable of magnifying objects by only four hundred times, it demonstrated the principles of an electron microscope. Two years later, Ruska constructed an electron microscope that exceeded the resolution possible with an optical microscope.[1]

Reinhold Rudenberg, the scientific director of Siemens, had patented the electron microscope in 1931, stimulated by family illness to make the poliomyelitis virus particle visible. In 1937 Siemens began funding Ruska and Bodo von Borries to develop an electron microscope. Siemens also employed Ruska's brother Helmut to work on applications, particularly with biological specimens.[2][3]

In the same decade Manfred von Ardenne pioneered the scanning electron microscope and his universal electron microscope.[4]

Siemens produced the first commercial Transmission Electron Microscope (TEM) in 1939, but the first practical electron microscope had been built at the University of Toronto in 1938, by Eli Franklin Burton and students Cecil Hall, James Hillier, and Albert Prebus.[5]

Although modern electron microscopes can magnify objects up to two million times, they are still based upon Ruska's prototype. The electron microscope is an essential item of equipment in many laboratories. Researchers use them to examine biological materials (such as microorganisms and cells), a variety of large molecules, medical biopsy samples, metals and crystalline structures and the characteristics of various surfaces. The electron microscope is also used extensively for inspection, quality assurance and failure analysis applications in industry, including, in particular, semiconductor device fabrication.

Types

Transmission Electron Microscope (TEM)

The original form of electron microscope, the transmission electron microscope (TEM) uses a high voltage electron beam to create an image. The electrons are emitted by an electron gun, commonly fitted with a tungsten filament cathode as the electron source. The electron beam is accelerated by an anode typically at +100 keV (40 to 400 keV) with respect to the cathode, focused by electrostatic and electromagnetic lenses, and transmitted through the specimen that is in part transparent to electrons and in part scatters them out of the beam. When it emerges from the specimen, the electron beam carries information about the structure of the specimen that is magnified by the objective lens system of the microscope. The spatial variation in this information (the "image") is viewed by projecting the magnified electron image onto a fluorescent viewing screen coated with a phosphor or scintillator material such as zinc sulfide. The image can be photographically recorded by exposing a photographic film or plate directly to the electron beam, or a high-resolution phosphor may be coupled by means of a lens optical system or a fibre optic light-guide to the sensor of a CCD (charge-coupled device) camera. The image detected by the CCD may be displayed on a monitor or computer.

Resolution of the TEM is limited primarily by spherical aberration, but a new generation of aberration correctors have been able to partially overcome spherical aberration to increase resolution. Hardware correction of spherical aberration for the High Resolution TEM (HRTEM) has allowed the production of images with resolution below 0.5 Ångström (50 picometres)[6] at magnifications above 50 million times.[7] The ability to determine the positions of atoms within materials has made the HRTEM an important tool for nano-technologies research and development.[8]

Scanning Electron Microscope (SEM)

An image of an ant in a scanning electron microscope

Unlike the TEM, where electrons of the high voltage beam carry the image of the specimen, the electron beam of the Scanning Electron Microscope (SEM)[9] does not at any time carry a complete image of the specimen. The SEM produces images by probing the specimen with a focused electron beam that is scanned across a rectangular area of the specimen (raster scanning). At each point on the specimen the incident electron beam loses some energy, and that lost energy is converted into other forms, such as heat, emission of low-energy secondary electrons, light emission (cathodoluminescence) or x-ray emission. The display of the SEM maps the varying intensity of any of these signals into the image in a position corresponding to the position of the beam on the specimen when the signal was generated. In the SEM image of an ant shown at right, the image was constructed from signals produced by a secondary electron detector, the normal or conventional imaging mode in most SEMs.

Generally, the image resolution of an SEM is about an order of magnitude poorer than that of a TEM. However, because the SEM image relies on surface processes rather than transmission it is able to image bulk samples up to several centimetres in size (depending on instrument design) and has a much greater depth of view, and so can produce images that are a good representation of the 3D structure of the sample.

Reflection Electron Microscope (REM)

In the Reflection Electron Microscope (REM) as in the TEM, an electron beam is incident on a surface, but instead of using the transmission (TEM) or secondary electrons (SEM), the reflected beam of elastically scattered electrons is detected. This technique is typically coupled with Reflection High Energy Electron Diffraction (RHEED) and Reflection high-energy loss spectrum (RHELS). Another variation is Spin-Polarized Low-Energy Electron Microscopy (SPLEEM), which is used for looking at the microstructure of magnetic domains.[10]

Scanning Transmission Electron Microscope (STEM)

The STEM rasters a focused incident probe across a specimen that (as with the TEM) has been thinned to facilitate detection of electrons scattered through the specimen. The high resolution of the TEM is thus possible in STEM. The focusing action (and aberrations) occur before the electrons hit the specimen in the STEM, but afterward in the TEM. The STEMs use of SEM-like beam rastering simplifies annular dark-field imaging, and other analytical techniques, but also means that image data is acquired in serial rather than in parallel fashion.

Sample preparation

An insect coated in gold for viewing with a scanning electron microscope.

Materials to be viewed under an electron microscope may require processing to produce a suitable sample. The technique required varies depending on the specimen and the analysis required:

Disadvantages

Pseudocolored SEM image of the feeding basket of Antarctic krill. Real electron microscope images do not carry any color information; they are greyscale. The first degree filter setae carry in v-form two rows of second degree setae, pointing towards the inside of the feeding basket. The purple ball is one micrometer in diameter. To display the total area of this structure one would have to tile this image 7500 times.

Electron microscopes are expensive to build and maintain, but the capital and running costs of confocal light microscope systems now overlaps with those of basic electron microscopes. They are dynamic rather than static in their operation, requiring extremely stable high-voltage supplies, extremely stable currents to each electromagnetic coil/lens, continuously-pumped high- or ultra-high-vacuum systems, and a cooling water supply circulation through the lenses and pumps. As they are very sensitive to vibration and external magnetic fields, microscopes designed to achieve high resolutions must be housed in stable buildings (sometimes underground) with special services such as magnetic field cancelling systems. Some desktop low voltage electron microscopes have TEM capabilities at very low voltages (around 5 kV) without stringent voltage supply, lens coil current, cooling water or vibration isolation requirements and as such are much less expensive to buy and far easier to install and maintain, but do not have the same ultra-high (atomic scale) resolution capabilities as the larger instruments.

The samples largely have to be viewed in vacuum, as the molecules that make up air would scatter the electrons. One exception is the environmental scanning electron microscope, which allows hydrated samples to be viewed in a low-pressure (up to 20 Torr/2.7 kPa), wet environment.

Scanning electron microscopes usually image conductive or semi-conductive materials best. Non-conductive materials can be imaged by an environmental scanning electron microscope. A common preparation technique is to coat the sample with a several-nanometer layer of conductive material, such as gold, from a sputtering machine; however, this process has the potential to disturb delicate samples.

Small, stable specimens such as carbon nanotubes, diatom frustules and small mineral crystals (asbestos fibres, for example) require no special treatment before being examined in the electron microscope. Samples of hydrated materials, including almost all biological specimens have to be prepared in various ways to stabilize them, reduce their thickness (ultrathin sectioning) and increase their electron optical contrast (staining). These processes may result in artifacts, but these can usually be identified by comparing the results obtained by using radically different specimen preparation methods. It is generally believed by scientists working in the field that as results from various preparation techniques have been compared and that there is no reason that they should all produce similar artifacts, it is reasonable to believe that electron microscopy features correspond with those of living cells. In addition, higher-resolution work has been directly compared to results from X-ray crystallography, providing independent confirmation of the validity of this technique.[citation needed] Since the 1980s, analysis of cryofixed, vitrified specimens has also become increasingly used by scientists, further confirming the validity of this technique.[11][12][13]

Applications

Semiconductor and data storage

  • Circuit edit
  • Defect analysis
  • Failure analysis

Biology and life sciences

  • Diagnostic electron microscopy
  • Cryobiology
  • Protein localization
  • Electron tomography
  • Cellular tomography
  • Cryo-electron microscopy
  • Toxicology
  • Biological production and viral load monitoring
  • Particle analysis
  • Pharmaceutical QC
  • Structural biology
  • 3D tissue imaging
  • Virology
  • Vitrification

Research

  • Electron beam-induced deposition
  • Materials qualification
  • Materials and sample preparation
  • Nanoprototyping
  • Nanometrology
  • Device testing and characterization

Industry

  • High-resolution imaging
  • 2D & 3D micro-characterization
  • Macro sample to nanometer metrology
  • Particle detection and characterization
  • Direct beam-writing fabrication
  • Dynamic materials experiments
  • Sample preparation
  • Forensics
  • Mining (mineral liberation analysis)
  • Chemical/Petrochemical

See also

References

  1. ^ a b Ernst Ruska Nobel Prize autobiography
  2. ^ Ernst Ruska (1986). "Ernst Ruska Autobiography". Nobel Foundation. http://nobelprize.org/nobel_prizes/physics/laureates/1986/ruska-autobio.html. Retrieved 2007-02-06. 
  3. ^ DH Kruger, P Schneck and HR Gelderblom (May 13, 2000). "Helmut Ruska and the visualisation of viruses". The Lancet 355 (9216): 1713–1717. doi:10.1016/S0140-6736(00)02250-9. 
  4. ^ M von Ardenne and D Beischer (1940). "Untersuchung von metalloxud-rauchen mit dem universal-elektronenmikroskop" (in German). Zeitschrift Electrochemie 46: 270–277. 
  5. ^ MIT biography of Hillier
  6. ^ Erni, Rolf (2009). "Atomic-Resolution Imaging with a Sub-50-pm Electron Probe". Physical Review Letters 102: 096101. doi:10.1103/PhysRevLett.102.096101. 
  7. ^ The Scale of Things, DOE Office of Basic Energy Sciences (BES).
  8. ^ Michael A. O'Keefe, Lawrence F. Allard. Sub-Ångstrom Electron Microscopy for Sub-Ångstrom Nano-Metrology. http://www.osti.gov/bridge/servlets/purl/821768-E3YVgN/native/821768.pdf. 
  9. ^ Scanning electron microscopy 1928 - 1965
  10. ^ NCEM National Center for Electron Microscopy: SPLEEM
  11. ^ Adrian, Marc; Dubochet, Jacques; Lepault, Jean; McDowall, Alasdair W. (1984). "Cryo-electron microscopy of viruses". Nature 308 (5954): 32–36. doi:10.1038/308032a0. 
  12. ^ Sabanay, I.; Arad, T.; Weiner, S.; Geiger, B. (1991). "Study of vitrified, unstained frozen tissue sections by cryoimmunoelectron microscopy". Journal of Cell Science 100 (1): 227–236. PMID 1795028. http://jcs.biologists.org/cgi/content/abstract/100/1/227. 
  13. ^ Kasas, S.; Dumas, G.; Dietler, G.; Catsicas, S.; Adrian, M. (2003). "Vitrification of cryoelectron microscopy specimens revealed by high-speed photographic imaging". Journal of Microscopy 211 (1): 48–53. doi:10.1046/j.1365-2818.2003.01193.x. 

External links

General

History

Other

Retrieved from "http://en.wikipedia.org/wiki/Electron_microscope"

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